| 1. | 3 . finally , we explore a serial of other fabrication technology of sbd of high frequency , including oxidation techniques , photoetching techniques and vacuum deposition . an original sbd of high frequency has been made
最后，利用所生长的薄硅外延片，探索出其它一系列相关的高频肖特基二极管的制作工艺，包括氧化工艺、光刻工艺、真空镀膜工艺等，制作出了高频肖特基二极管的原型器件。 |
